Equipment

Fabrication of materials and structures

Basic ammonothermal GaN crystallization reactors, φ=20 (5 units)

Characterization of materials and devices

X‑ray diffractometer (XRD)

Fabrication of materials and structures

MBRAUN high‑purity gloveboxes (2 units)

Fabrication of materials and structures

CMP polishing machines (4 units)

Characterization of materials and devices

Delta Technologies X‑ray goniometer for crystal orientation (3 units)

Characterization of materials and devices

Mitutoyo surface roughness tester

Fabrication of materials and structures

TAKATORI WSD‑K2 single‑wire saw (SWS)

Fabrication of materials and structures

DWT diamond wire saw – MES type (2 units)

Fabrication of materials and structures

DWT diamond wire saw – SWS type (2 units)

Fabrication of materials and structures

LAM PLAN bench‑top polishing machines (8 units)

Characterization of materials and devices

Bruker Atomic Force Microscope (AFM)

Characterization of materials and devices

ATOS optical 3D metrology system (interferometry/structured light)