Equipment

Characterization of materials and devices

Mitutoyo surface roughness tester

Fabrication of materials and structures

TAKATORI WSD‑K2 single‑wire saw (SWS)

Fabrication of materials and structures

DWT diamond wire saw – MES type (2 units)

Fabrication of materials and structures

DWT diamond wire saw – SWS type (2 units)

Fabrication of materials and structures

LAM PLAN bench‑top polishing machines (8 units)

Characterization of materials and devices

Bruker Atomic Force Microscope (AFM)

Characterization of materials and devices

ATOS optical 3D metrology system (interferometry/structured light)

Characterization of materials and devices

Zeiss optical microscope

Characterization of materials and devices

Nikon optical microscope

Fabrication of materials and structures

CNC machining center R1000 "Baca" (2 units)

Fabrication of materials and structures

High pressure chamber Φ30

Fabrication of materials and structures

High pressure chamber Φ40