Name: Reaktory HVPE
Contact person: Dr inż. Tomasz Sochacki tsochacki@unipress.waw.pl
Laboratory: NL-3
Location: ul. Sokołowska 29/37 Warszawa

Research capabilities and technical data

HVPE (Halide Vapor Phase Epitaxy) reactor designed for bulk GaN crystallization — both undoped and doped with Si, Ge, C, Mn, and Fe — as well as for AlGaN growth, with capability for substrates up to 2 inches in diameter.

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