| Name: | Reaktor do epitaksji z wiązek molekularnych z plazmą azotową VG90 |
| Contact person: | dr inż. Marcin Siekacz msiekacz@unipress.waw.pl |
| Laboratory: | NL-14 |
| Location: | al. Prymasa Tysiąclecia 98, Warszawa |
Research capabilities and technical data
Precise epitaxy of high-quality nitride materials III-V (GaN, AlN, InN). The reactor has 10 effusion cells (Ga, In, Al, Si, Ge, Mg, three RF nitrogen plasma cells)