| Name: | Multifunctional SEM-based, characterization setup |
| Contact person: | dr inż. Łucja Marona (lucja.marona@unipress.waw.pl) |
| Laboratory: | NL-15 |
| Location: | al. Prymasa Tysiąclecia 98, Warszawa; laboratorium SEM, piwnica |
Research capabilities and technical data
Scanning Electron Microscope Hitachi SU-70 equipped with a Horiba Jobin Yvon cathodoluminescence measurement system
Features:
Topography
Cathodoluminescence (CL)
Electron Beam Induced Current (EBIC)
Energry Dispersive Spectroscopy (EDS)
Electron beam litography
Cryogenic stage (4-300 K)
