| Name: | Napylarka katodowa Q150R S Quorum |
| Contact person: | Dr. hab. Jan Weyherweyher@unipress.waw.plMgr inż. Magdalena Zającazajac@mail.unipress.waw.pl |
| Laboratory: | NL-3 |
| Location: | ul. Sokołowska 29/37 Warszawa |
Research capabilities and technical data
Sputter Coater Q150R S is used for clening semiconductore sample in argon plazma.